Elimination of periodic nonlinearities of actuators with internal periodic processes

Abstract: We discuss an algorithm that eliminates the periodic non-linearity of a bimorph piezo actuator by modifying the phase of the voltage waveforms used for driving the actuator. The procedure presented allows for a separate optimization of the motion of the actuator groups in order to obtain the properties desired (such as a specific stepsize or maximum force). The resulting response of a bimorph piezo drive, also under different loads, is experimentally investigated. The optimization process can be applied to other actuators relying on internal periodic processes, if the motion is reproducible, and is limited by measurement noise or manufacturing tolerances only.