Nonlinear Power Absorption in CCRF Discharges: Transition from Symmetric to Asymmetric Configurations (2504.19804v1)

Abstract: This work builds upon previous studies of nonlinear dynamics in low-pressure capacitively coupled radio-frequency discharges, focusing on the electron power absorption mechanism in discharges with various geometric asymmetries. We present a comprehensive investigation using a fully kinetic electrostatic 1d3v Particle-in-Cell/Monte Carlo collision simulation in spherical geometry. By systematically varying the inner electrode radius and the electrode gap distance, we analyze the influence of geometric asymmetry on key plasma properties, including electron density, power absorption, electron dynamics, and current characteristics. A central focus is placed on the cumulative power density as a diagnostic for energy deposition. In strongly asymmetric configurations, the cumulative electron power density exhibits distinct stepwise increases during sheath expansion, corresponding to the acceleration of successive electron beams. These nonlinear signatures are directly linked to the excitation of plasma series resonance and enhanced beam-driven power absorption. In contrast, more symmetric configurations display smoother, more symmetric cumulative power evolution, indicating balanced energy transfer at both sheaths and reduced nonlinearities. Time- and space-resolved diagnostics of cumulative power, current waveforms, and densities of energetic electrons reveal the critical role of asymmetry in shaping electron confinement and beam-driven power absorption. These findings demonstrate that the discharge geometry is actually an important design parameter which needs to taken into account during the design and construction phase of a reactor as it directly influences the plasma behavior with respect to energy deposition.