Recycling of Perovskite Substrate (2212.05704v1)

Abstract: The use of water-soluble sacrificial layer of Sr$3$Al$_2$O$_6$ has tremendously boosted the research on freestanding functional oxide thin films, especially thanks to its ultimate capability to produce high-quality epitaxial perovskite thin films. However, the costly single-crystalline substrates, e.g. SrTiO$_3$, were generally discarded after obtaining the freestanding thin films. Here, we demonstrate that the SrTiO$_3$ substrates can be recycled to fabricate La${0.7}$Sr$_{0.3}$MnO$_3$ films with nearly identical structural and electrical properties. After attaining freestanding thin films, the residues on SrTiO$_3$ can be removed by 80 \degree C hot water soaking and rinsing treatments. Consequently, the surface of SrTiO$_3$ reverted to its original step-and-terrace structure.