Overview and study of the 3D-TSV interconnects induced coupling in CMOS circuits

Abstract: The semiconductor industry's rapid advancement pushes conventional two-dimensional technology to its utmost limitations in terms of scaling, performance, and cost factors. These challenges drive the usage of 3D technology in the production of various Integrated Circuits. One of the numerous features of 3D Integration is the use of Through Silicon Vias (TSVs) for the assembly of multilayers into a single stack. This process, which was initially developed for memory chips, has been used afterward in many applications in other areas of microelectronics. The purpose of this research is to assess the effect of 3D-TSV interconnection on the performance of MOS transistors and CMOS circuits. This is accomplished using numerical and analytical models capable of describing the substrate coupling induced by TSV at the circuit level. The analytical approach proposed enables the study and optimization of the performance, not only of MOS devices but also large CMOS circuits with 3D interconnects as a function of various technological and electrical parameters.