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Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy (1812.06578v2)
Published 17 Dec 2018 in physics.optics and physics.app-ph
Abstract: A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.
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