Fourth-harmonic UV light generation in integrated silicon nitride microresonators

Abstract: Integrated silicon nitride (Si3N4) resonators have emerged as a leading platform for nonlinear photonics, yet generating light at wavelength in the ultraviolet (UV) has remained elusive in single-resonator systems. Here we report the first observation of fourth-harmonic generation reaching the blue and ultraviolet spectral regions in an integrated Si3N4 microring resonator. We systematically investigate the input-power dependence of the wavelength ranges supporting second-, third-, and fourth-harmonic generation, and study the input-power-dependent variation of the circulating fourth-harmonic signal in the UV. These results extend the operational bandwidth of integrated Si3N4 nonlinear photonic platforms to the lower edge of the material transparency window, enabling on-chip UV frequency conversion. Near-ultraviolet generation around 400 nm will enable on-chip excitation of defect-based quantum emitters in hexagonal boron nitride, enhance Raman spectroscopy through increased scattering cross-sections at shorter wavelengths, and support compact fluorescence-based bio-imaging platforms exploiting intrinsic cellular fluorophores.