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Thermal scanning probe lithography for fabrication of perforated metallic films

Published 14 Oct 2025 in physics.optics | (2510.12234v1)

Abstract: Thermal scanning probe lithography offers high resolution and versatility, making it a promising alternative for fabricating photonic devices. Here, we introduce a new method that expands its applications by enabling direct fabrication of arbitrary perforated patterns on a silver film.

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