Four-Port Probe Stations and SOLR Calibration Standard Design up to 125 GHz on 28 nm CMOS

Abstract: This paper presents two innovative four-port probe stations developed by FormFactor Incorporated (FFI) and MPI Corporation (MPI), and a four-port calibration standard design up to 125 GHz for the probe stations. True four-port probing at mmWave and beyond does not yet exist, but is anticipated for future multi-band wireless devices using several antennas and RF chains. The four-port probe stations are housed in the THz measurement facility at NYU and allow simultaneous probing from East, West, North, and South orientations, which presents challenges for calibration. An on-chip Short-Open-Load-Reciprocal (SOLR) calibration (cal) standard is designed leveraging UMC's 28 nm CMOS process. S/O/L standard S-parameters are extracted using a virtual multiline Thru-Reflect-Line (mTRL) cal and used to validate SOLR cal performance via simulations up to 125 GHz. The novel probing solutions from MPI and FFI, along with the SOLR cal, open up considerable opportunities for precise RF characterization across wide frequency ranges.