St4DeM: A software suite for multi-modal 4D-STEM acquisition techniques

Abstract: A suite of acquisition applications related to the 4D-STEM technique is presented as a software package written within the Digital Micrograph environment, which is a widely used software platform in worldwide electron microscopy laboratories. The 4D-STEM technique allows the acquisition of diffraction patterns at each electron probe position in a scanning transmission electron microscope map. This suite includes 4D-STEM acquisition, ptychography, EELS/EDS spectrum imaging, tomography and basic virtual visualization and alignment methods on 4D data including incoherent differential phase contrast analysis. By integrating electron tomography with 4D-STEM and EELS SI, St4DeM enables the acquisition and analysis of 7-dimensional data.