3D in-situ profiling in a laser micromachining station using dual-comb LiDAR

Published 13 Apr 2025 in physics.optics | (2504.09659v1)

Abstract: We demonstrate the integration of coaxial dual-comb LiDAR into a laser micromachining station, enabling 3D profiling with sub-micron axial precision without moving the machined piece. This setup facilitates in-situ nondestructive testing (NDT) and evaluation, reducing the effort and time required for micromachining process development and control.

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