Wireless and passive pressure detection using magneto-mechanical resonances in process engineering

Abstract: A custom-developed magneto-mechanical resonator (MMR) for wireless pressure measurement is investigated for potential applications in process engineering. The MMR sensor utilises changes in the resonance frequency caused by pressure on a flexible 3D printed membrane. The thickness of the printed membrane plays a crucial role in determining the performance and sensitivity of MMRs, and can be tailored to meet the requirements of specific applications. The study includes static and dynamic measurements to determine the pressure sensitivity and temporal resolution of the sensor. The results show a minimum sensitivity of $0.06~\text{Hz mbar}^{-1}$ and are in agreement with theoretical calculations and measurements. The maximum sensor readout frequency is $2~\text{Hz}$ in this study. Additionally, the temperature dependence of the sensor is investigated, revealing a significant dependence of the resonance frequency on temperature. The developed MMR offers a promising and versatile method for precise pressure measurements in process engineering environments.