A versatile method for nano-fabrication on diamond film: flexible diamond metasurfaces as a demonstration

Abstract: Diamond exhibits superb performance across a wide range of applications due to its enormous outstanding properties in electronic, photonic and quantum fields. Yet heterogeneous integration of diamond for on-chip functionalities, like 2D materials, remains challenging due to the hard acquisition of scalable, transferable and ultrathin diamond samples. Recently, the edge-exposed exfoliation has been demonstrated as an effective way to produce wafer-scale, freestanding and ultrathin diamond films. However, the incompatibility of the newly developed diamond film with conventional nano-fabrication methods makes it difficult to fabricate diamond film into practical devices. Herein, we demonstrate the mask-transferring by sugar as a versatile method for pattern-definition on diamond films, which shows excellent geometrical resolution and accuracy comparing to conventional approaches. Additionally, based on this method, the flexible all-diamond metasurfaces functioning as structural colors have been achieved, which indicates its huge potential for fabricating more diamond-related devices.