Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge

Abstract: This work investigates the discharge properties of a cylindrical magnetized capacitive coupled plasma discharge produced between a pair of coaxial cylinders. For the purpose of diagnosing plasma properties and electron energy distribution function (EEDF), an in-house electronic circuit and an RF-compensated Langmuir probe are devised and constructed. The second harmonic technique (SHT) has been applied to obtain the direct measurement of EEDF and evaluated the effect of RF electron magnetization on the bulk plasma heating within the discharge. The effect of external magnetic field on the overall rise in plasma properties has been verified by use of particle and energy balance equations derived for argon discharge.