Development of HfO$_{2-X}$-based Neural Memristor Utilizing Tantalum and Molybdenum Electrode

Abstract: In this research, we have fabricated a Ta/HfO${2-X}$/Mo-based single-cell memristor, a unique configuration worldwide. The synaptic behaviour of Tantalum and Molybdenum electrodes on an HfOx-based memristor device has been investigated. HfO${2-X}$ (15 nm) was grown using the Pulsed Laser Deposition (PLD) method, and electrodes were fabricated using a sputtering system and photolithography method. The metal oxide stoichiometry was ascertained via X-ray photoelectron spectroscopy (XPS). Long-term Potentiation (LTP) and paired pulsed facilitation (PPF) characteristics, which play a significant role in the learning processes of artificial neural networks, have been successfully obtained. Current-voltage measurements and retention tests were performed to determine the SET and RESET states of the device in appropriate ranges. The results show that this memristor device is a strong candidate for Artificial Neural Network (ANN) applications.