Pathway for Unraveling Chemical Composition Effects of Metal-Organic Precursors for FIBID Applications

Abstract: The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor, extensive testing under specialized gas injection systems is required along with time-consuming and costly chemical analysis typically conducted using scanning electron microscopes. This process can be quite challenging due to its complexity and expense. Here, we present a method for investigating the chemical composition effects of new metal-organic precursors, prepared in form of supported thick layers, used in FIBID/FEBID applications by utilizing achievable SEM BSE/EDX analysis along with Machine Learning data processing techniques. This approach enables a comprehensive fast examination of decomposition processes during FIBID, providing valuable insights into how these chemical composition effects impact the final properties of metallic deposits. Our method can be employed to optimize, pre-screen, and score new potential precursors for FIBID applications by significantly reducing the time required and conserving valuable resources. Our finding brings also new perspectives across diverse areas of nanoscience in particularly enhancing strongly the field of metal structures nanofabrication.