Data Processing Techniques for Ion and Electron Energy Distribution Functions

Abstract: Retarding field energy analyzers and Langmuir probes are routinely used to obtain ion and electron energy distribution functions (IEDF, EEDF). These typically require knowledge of the first and second derivatives of the I-V characteristics, both of which can be obtained in various ways. This poses challenges inherent to differentiating noisy signals, a frequent problem with electric-probe plasma diagnostics. A brief review of commonly used analog and numerical filtering and differentiation techniques is presented, together with their application on experimental data collected in a radio-frequency plasma. The application of each method is detailed with regards to the obtained IEDF and EEDF, the deduced plasma parameters, dynamic range, energy resolution and signal distortion.