Generation of nitrogen-vacancy ensembles in diamond for quantum sensors: Optimization and scalability of CVD processes

Abstract: Ensembles of nitrogen-vacancy (NV) centers in diamond are a leading platform for practical quantum sensors. Reproducible and scalable fabrication of NV-ensembles with desired properties is crucial. This work addresses these challenges by developing a chemical vapor deposition (CVD) synthesis process to produce diamond material at scale with improved NV-ensemble properties for a target NV density. The material reported in this work enables immediate sensitivity improvements for current devices. In addition, techniques established in this work for material and sensor characterization at different stages of the CVD synthesis process provide metrics for future efforts targeting other NV densities or sample geometries.