Superconducting microwire detectors with single-photon sensitivity in the near-infrared

Abstract: We report on the fabrication and characterization of single-photon-sensitive WSi superconducting detectors with wire widths from 1 {\mu}m to 3 {\mu}m. The devices achieve saturated internal detection efficiency at 1.55 {\mu}m wavelength and exhibit maximum count rates in excess of 10^5 s^-1. We also investigate the material properties of the silicon-rich WSi films used for these devices. We find that many devices with active lengths of several hundred microns exhibit critical currents in excess of 50% of the depairing current. A meandered detector with 2.0 {\mu}m wire width is demonstrated over a surface area of 362x362 {\mu}m^2, showcasing the material and device quality achieved.