Scaling theory for two-dimensional single domain growth driven by attachment of diffusing adsorbates

Abstract: Epitaxial growth methods are a key technology used in producing large-area thin films on substrates but as a result of various factors controlling growth processes the rational optimization of growth conditions is rather difficult. Mathematical modeling is one approach used in studying the effects of controlling factors on domain growth. The present study is motivated by a recently found scaling relation between the domain radius and time for chemical vapor deposition of graphene. Mathematically, we need to solve the Stefan problem; when the boundary moves, its position should be determined separately from the boundary conditions needed to obtain the spatial profile of diffusing adsorbates. We derive a closed equation for the growth rate constant defined as the domain area divided by the time duration. We obtain approximate analytical expressions for the growth rate; the growth rate constant is expressed as a function of the two-dimensional diffusion constant and the rate constant for the attachment of adsorbates to the solid domain. In experiments, the area is decreased by stopping the source gas flow. The rate of decrease of the area is obtained from theory. The theoretical results presented provide a foundation to study controlling factors for domain growth.