Nanostructuring of LNOI for efficient edge coupling

Abstract: We present the design, fabrication and characterization of LNOI fiber-to-chip inverse tapers for efficient edge coupling. The etching characteristics of various LNOI crystal cuts are investigated for the realization of butt-coupling devices. We experimentally demonstrate that the crystal cut limits the performance of mode matching tapers. We report a butt-coupling loss of 2.5 dB/facet and 6 dB/facet by implementing 200 nm tip mode matching tapers in $+Z$-cut LNOI and $X$-cut MgO:LNOI waveguides with low propagation loss. We anticipate that these results will provide insight into the nanostructuring of LNOI and into the further development of efficient butt-coupling in this platform.