Improved optomechanical disk resonator sitting on a pedestal mechanical shield

Abstract: We experimentally demonstrate the controlled enhancement of the mechanical quality factor Q of GaAs disk optomechanical resonators. Disks vibrating at 1.3 GHz with a mechanical shield integrated in their pedestal show a Q improvement by a factor 10 to 16. The structure is modeled numerically and different modes of vibration are observed, which shed light on the Q enhancement mechanism. An optimized double-disk geometry is presented that promises Q above the million for a large parameter range.