A portable MBE system for in situ X-Ray investigations at synchrotron beamlines

Abstract: A portable synchrotron MBE system is designed and applied for in situ investigations. The growth chamber is equipped with all the standard MBE components such as effusion cells with shutters, main shutter, cooling shroud, manipulator, RHEED setup and pressure gauges. The characteristic feature of the system is the beryllium windows which are used for in situ x-ray measurements. An UHV sample transfer case allows in-vacuo transfer of samples prepared elsewhere. We describe the system design and demonstrate it's performance by investigating the annealing process of buried InGaAs self organized quantum dots.