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Effect of cavity spacing (relative cavity area) on membrane yield independent of diameter

Ascertain the influence of cavity spacing, expressed as relative cavity area, on the yield of intact suspended membranes of monolayer and artificially stacked double-layer CVD graphene independent of cavity diameter by evaluating substrates that maintain identical cavity diameters while varying the spacing between cavities.

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Background

Device layouts varied both membrane diameters and spacing between cavities, affecting the relative cavity area and adhesion. The larger spacing used on Fraunhofer IZM substrates correlated with higher yields but reduced active sensing area.

Because relative cavity area is confounded with cavity diameter in the current designs, the authors cannot draw firm conclusions about spacing effects on yield without new substrates that decouple these parameters.

References

As expected, the yield drops with increasing relative cavity area, i.e., with decreasing spacing between cavities. However, conclusions may not be drawn from this evaluation since the relative cavity area correlates with the cavity diameter in the used layouts. To evaluate the effect of the relative cavity area on the yield properly, new substrates with the same cavity diameter but different spacing would be required.

— High-yield large-scale suspended graphene membranes over closed cavities for sensor applications (2408.16408 - Lukas et al., 29 Aug 2024) in Results, yield versus relative cavity area analysis referencing Figure S4; pages 9–10