High-$Q$ superconducting resonators fabricated in an industry-scale semiconductor-fabrication facility

Abstract: Universal quantum computers promise to solve computational problems that are beyond the capabilities of known classical algorithms. To realize such quantum hardware on a superconducting material platform, a vast number of physical qubits has to be manufactured and integrated at high quality and uniformity on a chip. Anticipating the benefits of semiconductor industry processes in terms of process control, uniformity and repeatability, we set out to manufacture superconducting quantum circuits in a semiconductor fabrication facility. In order to set a baseline for the process quality, we report on the fabrication of coplanar waveguide resonators in a 200 mm production line, making use of a two-layer superconducting circuit technology. We demonstrate high material and process quality by cryogenic Q-factor measurements exceeding $10^6$ in the single-photon regime, for microwave resonators made of both Niobium and Tantalum. In addition, we demonstrate the incorporation of superconducting Niobium air bridges in our process, while maintaining the high quality factor of Niobium resonators.