LPV sequential loop closing for high-precision motion systems

Abstract: Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The presence of position dependent dynamics in such motion systems severely limits achievable position tracking performance using conventional sequential loop closing (SLC) control design strategies. This paper presents a novel extension of the conventional SLC design framework towards linear-parameter-varying systems, which allows to circumvent limitations that are introduced by position dependent effects in high-precision motion systems. Advantages of the proposed control design approach are demonstrated in simulation using a high-fidelity model of a moving-magnet planar actuator system, which exhibits position dependency in both actuation and sensing.