Interfering Coherent Lightsheets Assisted Structure Synthesis (iCLASS) Technique for Nanofabrication (1809.05456v1)

Abstract: We propose a light-sheet based plane-selective fabrication technique that enables fabrication of nano-electronic/nano-fluidic components (nano-wires, nano-waveguides, nano-gratings and nano-channels) with specificity, selectivity on a user-defined patterning area. The technique is termed as, interfering coherent lightsheet assisted structure synthesis (iCLASS). iCLASS use specialized $2\pi$-geometry (consists of two opposing cylindrical lenses) that facilitates interference of counter-propagating light-sheets at a common geometrical focus. This gives rise to 1D interference pattern with a feature size of less than diffraction limit. A commercially available S1813 photoresist coated on a cleaned glass substrate is subsequently exposed to the light-sheets pattern (visible light). This is followed by the development of photoresist film to imprint the 1D nano-pattern. Experimental study and analysis shows an inter-feature spacing and feature-size of approximately, $\lambda/2$. Investigation show that the light-dose interaction-time ($\tau_{exp} +\tau_{dev}$) play crucial role in determining the feature-size and quality of fabricated nano-pattern array. The proposed iCLASS technique may find applications in nanoscience and nanotechnology.