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Lithium niobate micro-disk resonators of quality factors above 10^7 (1806.00099v1)
Published 16 May 2018 in physics.app-ph and physics.optics
Abstract: We report on fabrication of crystalline lithium niobate microresonators with quality factors above 107 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.
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