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Design and Fabrication of a Novel Micro Electromagnetic Actuator (0805.0935v1)
Published 7 May 2008 in cs.OH
Abstract: The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.