Optimizing Cladding Elasticity to Enhance Sensitivity in Silicon Photonic Ultrasound Sensors

Abstract: Ultrasound is widely used in medical imaging, and emerging photo-acoustic imaging is crucial for disease diagnosis. Currently, high-end photo-acoustic imaging systems rely on piezo-electric materials for detecting ultrasound waves, which come with sensitivity, noise, and bandwidth limitations. Advanced applications demand a large matrix of broadband, high-resolution, and scalable ultrasound sensors. Silicon photonic circuits have been introduced to meet these requirements by detecting ultrasound-induced deformation and stress in silicon waveguides. Although higher sensitivities could facilitate the exploration of new applications, the high stiffness of the waveguide materials constrains the intrinsic sensitivity of the silicon photonic circuits to ultrasound signals. Here, we explore the impact of the mechanical properties of a polymer cladding on the sensitivity of silicon photonic ultrasound sensors. Our model and experiments reveal that optimizing the polymer cladding's stiffness enhances the resonance wavelength sensitivity. Experimentally, we show a fourfold increase in the sensitivity compared to the sensors without a cladding polymer and, a twofold sensitivity increase compared to the sensors with a cladding polymer of saturated cross-linking density. Interestingly, comparing experiments with the optomechanical model suggests that the change in Young's Modulus alone cannot explain the sensitivity increase. In conclusion, polymer-coated silicon photonic ultrasound sensors exhibit potential for advanced photo-acoustic imaging applications. It offers the prospect of increasing the ultrasound detection sensitivity of silicon photonic ultrasound sensors while using CMOS-compatible processes. This paves the way to integrate the polymer-coated silicon photonic ultrasound sensors with electronics to utilize the sensors in advanced medical imaging applications.