Laser-Based Fabrication of Microstructures on Nickel Thin Films and Its Applications in On-Chip Thin Film Inductors

Abstract: This work reports on the fabrication of microbump structures on Ni films by single-pulse, localized laser irradiation. Conditions for the reproducible formation of such microstructures have been identified in terms of laser-irradiation and film parameters after systematic studies involving a relevant parameter space. The cracks and voids morphology of the sputtered films was rendered undesirable and hence, smoother Ni thin film of same thickness (200nm) were deposited by vacuum evaporation. The continuous nature of the film resulted in radially symmetric thermal expansion and deformation, thus achieving a high yield of microstructures. An improvement in the inductance and the quality factor of on-chip spiral inductors incorporating such laser-microstructured ferromagnetic nickel thin films was observed, which demonstrates the potential of such a laser-based method for fabrication or fine tuning of various micro-/nanoelectric/electronic sensor and other components and systems.