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Transmission Helium Ion Microscopy of Graphene (2004.01682v1)

Published 3 Apr 2020 in physics.app-ph and cond-mat.mes-hall

Abstract: We compare transmission He ion microscopy (HIM) to transmission electron microscopy (TEM) of graphene support films. We present spot transmission patterns that compare with scattering and range of ions in materials (SRIM) predictions, and show examples of scanning He$^+$ transmission images, based on integrated camera intensity. We also consider the potential for coherent HIM scattering.