Air mode silicon nitride photonic crystals and their application to nonlinear quantum optomechanical sensing

Abstract: Nanoscale photonic crystal cavity optomechanical devices enable detection of nanomechanical phenomena with a sensitivity sufficient to observe quantum effects. Here we present the design of a one-dimensional air-mode photonic crystal cavity patterned in a silicon nitride nanobeam, and show that it forms the basis for cavity optomechanical split-beam and paddle nanocavity devices useful for force detection and nonlinear quantum sensing. The air-mode of this device is advantageous for optomechanical coupling, while also having ultrahigh optical quality factor $Q_o\sim 10^6$ despite its proximity to the light-line and the relatively low refractive index of silicon nitride. Paddle nanocavities realized from this device have a quadratic coupling coefficient $g^{(2)}/2\pi$~=~10~MHz/nm$^{2}$, and their performance within the context of quantum optomechanics experiments is analyzed.