Quantify the stress dependence of the secondary diffraction component
Determine the quantitative dependence of the secondary crystalline diffraction component in sputtered niobium films on intrinsic film stress, including the stress dependence of its relative fraction.
References
Although the fitted amplitudes may be interpreted as estimates of the relative scattering contributions from the two diffraction components, the limited number of diffraction scans and parameter uncertainties preclude a robust determination of the stress dependence of the secondary component fraction. We therefore rely primarily on the XRD data as evidence for an additional diffraction component, while the quantitative dependence of the additional component on film stress remains a subject for future investigation with a larger diffraction dataset.