Electrical and optical properties of ITO thin films prepared by DC magnetron sputtering for low-emitting coatings

Abstract: Optimized DC magnetron sputtering system for the deposition of transparent conductive oxides (TCOs), such indium tin oxide (ITO) on glass substrate has been applied in order to achieve low-emitting (low-e) transparent coatings. To obtain the concerned electrical resistance and high infrared reflection, first the effect of applied sputtering power then oxygen flow on the properties of films have been investigated. The other depositions parameters are kept constant. Film deposition at at temperature 400 degree of Celsius in oxygen flow of 3 Standard Cubic Centimeters per Minute results in transparent and infrared reflecting coatings. Under this condition the highest attained average reflectance in the infrared is ({\lambda}=3-25 micron) 89.5% (lowest emittance equals to less than 11%), whereas transparency in the visible is 85% approximately. Plasma wavelength and carrier concentration was measured.