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A new dimension for piezo actuators: Free-form out-of-plane displacement of single piezo layers (1310.0342v1)
Published 12 Sep 2013 in cond-mat.mtrl-sci
Abstract: We present a controlled mode of "topological" displacement of homogeneous piezo films that arises solely from an inhomogeneous in-plane strain due to an inhomogeneous polarization. For the rotationally symmetric case, we develop a theoretical model that analytically relates the shape of the displacement to the polarization for the cases of in-plane and out-of-plane polarization. This is verified for several examples, and we further demonstrate controlled asymmetric deformations.
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